Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 17, 2010
Patent Application Number
12304957
Date Filed
May 30, 2007
Patent Primary Examiner
Patent abstract
Issue Providing a silicon film which can prevent damage of electronic devices formed on a substrate from occurrence, can prevent apparatus arrangement from becoming large-scale one, can improve coherency of a silicon thin film to a substrate, and is hardly happened crack and/or flaking, and providing a method for forming the silicon thin film.
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