Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nobuo Kimura0
Yoshitaka Fujita0
Tomoya Hidaka0
Norifumi Nakamoto0
Date of Patent
August 17, 2010
0Patent Application Number
105531090
Date Filed
April 14, 2004
0Patent Primary Examiner
Patent abstract
An object of the present invention is to provide a method for producing an organic thin film, which enables rapid film formation, and enables a dense organic thin film with minimal impurities to be formed stably, and in a plurality of consecutive repetitions.
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