Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shi-Wei Chu0
Jiun-Yann Yu0
Date of Patent
August 10, 2010
0Patent Application Number
124830260
Date Filed
June 11, 2009
0Patent Primary Examiner
Patent abstract
The present invention is a scanning system having spherical mirrors to operate a two-dimensional scanning. Aberration owing to oblique incident light is compensated to reach diffraction limit. With proper metallic coating, the present invention uses a wavelength from ultra-violet light to tera-hertz wavelength
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