Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Elke Gehring1
Peter Weidner1
Alexander Kasic1
Date of Patent
August 10, 2010
1Patent Application Number
117550631
Date Filed
May 30, 2007
1Patent Primary Examiner
Patent abstract
An apparatus includes an evaluating unit and a peak detection unit. The peak detection unit is configured to determine at least one peak parameter of a peak in a Fourier transformed reflection spectrum of infrared radiation reflected off a sample that may comprise trench structures. The evaluation unit is configured to determine from the at least one peak parameter and from a correction value containing information about an effective refractive index of the sample, a trench parameter of the trench structures.
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