US Patent 7772706 Air-gap ILD with unlanded vias
Patent 7772706 was granted and assigned to Intel on August, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A spacer is adjacent to a conductive line. Vias that do not completely land on the conductive line land on the spacer and do not punch through into a volume below the spacer.
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Patent Inventor Names
Boyan Boyanov0
Sridhar Balakrishnan0
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Official Website
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US Patent 07772706 Air-gap ILD with unlanded vias US Patent 7772706 Air-gap ILD with unlanded vias
Infobox
Patent Number
077727060
Patent Number
77727060
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077727060
Date of Patent
August 10, 2010
0Patent Application Number
119656650
Date Filed
December 27, 2007
0Official Website
Patent Primary Examiner
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Website URL
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US Patent 07772706 Air-gap ILD with unlanded vias
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07772706
Date of patent
August 10, 2010
Patent application number
11965665
Date Filed
December 27, 2007
Patent primary examiner
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