US Patent 7772564 Particle-optical apparatus equipped with a gas ion source
Patent 7772564 was granted and assigned to FEI Company on August, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 21, 2007
Date of Patent
August 10, 2010
Patent Application Number
11709303
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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