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US Patent 7772564 Particle-optical apparatus equipped with a gas ion source

Patent 7772564 was granted and assigned to FEI Company on August, 2010 by the United States Patent and Trademark Office.

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Current Assignee
FEI Company
FEI Company
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7772564
Date of Patent
August 10, 2010
Patent Application Number
11709303
Date Filed
February 21, 2007
Patent Primary Examiner
‌
Bernard E Souw
Patent abstract

The invention relates to an electron impact gas ion with high brightness and low energy spread. This high brightness is achieved by injecting electrons in a small ionization volume (from less than 1 μm to several tens of micrometers in size) from one side and extracting ions from the other. The electrons injected are produced by a high brightness electron source, such as a field emitter or a Schottky emitter.

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