Patent attributes
The invention relates to a micropump comprising a pump membrane (5) which can be moved by modifying the volume of a pump chamber which is adjacent to the pump membrane (5) and a base part (1), also comprising two valves which are arranged in recesses (10,11) in the base part and react to the pressure in the pump chamber in order to alternately open and close an inlet channel (8) and an outlet channel (9) for a medium to be pumped. According to the invention, the valves are formed by functioning valve modules (40,41) without any common components. The pre-manufactured valve modules, base modules comprising the base part and hose connections (2,3) and actuator modules comprising the actuator and the membrane are combined in order to produce said micropumps.
