Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Brian C. Lue0
Tetsuya Ishikawa0
Wing Lau Cheng0
Yan Ye0
Andrew Nguyen0
Daniel J. Hoffman0
Hiroji Hanawa0
Kartik Ramaswamy0
...
Date of Patent
August 3, 2010
0Patent Application Number
116839940
Date Filed
March 8, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A support for a substrate processing chamber comprises a fluid circulating reservoir comprising a channel having serpentine convolutions. A fluid inlet supplies a heat transfer fluid to the fluid circulating reservoir and a fluid outlet discharges the heat transfer fluid. In one version, the channel is doubled over to turn back upon itself.
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