Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akira Hisano0
Date of Patent
August 3, 2010
0Patent Application Number
117330160
Date Filed
April 9, 2007
0Patent Primary Examiner
Patent abstract
An AlRu sputtering target that is a sintered body composed of an AlRu intermetallic compound of 95 vol. % or more is provided. It is manufactured by a stable and low-cost method that provides it with an even texture, significantly reduces oxygen, prevents or suppresses the generation of particles, and improves the yield ratio of deposition goods.
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