Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshiaki Kurokawa0
Koichi Higuchi0
Date of Patent
August 3, 2010
0Patent Application Number
118166480
Date Filed
August 20, 2007
0Patent Primary Examiner
Patent abstract
A substrate treatment apparatus, which treats a substrate with a treatment liquid that is ultrasonically vibrated, includes an oscillator body which is rectangular-parallelepiped and has a treatment liquid supply path having an opening on a lower surface thereof in a first end portion in a longitudinal direction thereof and inclining to a second end portion in the longitudinal direction thereof, a vibrator which is provided on an upper surface of the oscillator body and ultrasonically vibrates the oscillator, and a heat exchanger which cools the treatment liquid supplied to the treatment liquid supply path.
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