Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Goro Nakatani0
Date of Patent
August 3, 2010
0Patent Application Number
118922890
Date Filed
August 21, 2007
0Patent Primary Examiner
Patent abstract
An acceleration sensor includes a semiconductor element built in a substrate, a wiring layer formed on the substrate, and a piezoresistor, formed on the substrate and made up of a part of the wiring layer, whose resistivity changes by the action of acceleration.
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