US Patent 7763095 Internal gettering by metal alloy clusters
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Patent abstract
The present invention relates to the internal gettering of impurities in semiconductors by metal alloy clusters. In particular, intermetallic clusters are formed within silicon, such clusters containing two or more transition metal species. Such clusters have melting temperatures below that of the host material and are shown to be particularly effective in gettering impurities within the silicon and collecting them into isolated, less harmful locations. Novel compositions for some of the metal alloy clusters are also described.
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US Patent 07763095 Internal gettering by metal alloy clusters US Patent 7763095 Internal gettering by metal alloy clusters
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Patent Number
0776309500
Patent Number
776309500
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Infobox
Is a
Patent Jurisdiction
Patent Number
077630950
Date of Patent
July 27, 2010
0Patent Application Number
114472230
Date Filed
June 5, 2006
0Official Website
Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
077630950
Date of Patent
July 27, 2010
0Patent Application Number
114472230
Date Filed
June 5, 2006
0Official Website
Patent Primary Examiner
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US Patent 07763095 Internal gettering by metal alloy clusters
Infobox
Is a
Patent jurisdiction
Patent number
07763095
Date of patent
July 27, 2010
Patent application number
11447223
Date Filed
June 5, 2006
Patent primary examiner
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