US Patent 7762114 Flow-formed chamber component having a textured surface

Patent 7762114 was granted and assigned to Applied Materials on July, 2010 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7762114

Date of Patent

July 27, 2010

Patent Application Number

11234012

Date Filed

September 9, 2005

Patent Citations Received

Patent Primary Examiner

‌

Dana Ross

Patent abstract

A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.