Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zonghoon Lee0
Reza Mohammadi0
Stephane Evoy0
Velimir Radmilovic0
Colin Ophus0
David Mitlin0
Ken Westra0
Nathaniel Nelson-Fitzpatrick0
Date of Patent
July 20, 2010
0Patent Application Number
118314340
Date Filed
July 31, 2007
0Patent Primary Examiner
Patent abstract
A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.
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