US Patent 7755367 Silicon MEMS resonators
Patent 7755367 was granted and assigned to Infineon Technologies on July, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 2, 2008
Date of Patent
July 13, 2010
Patent Application Number
12131145
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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