US Patent 7740768 Simultaneous front side ash and backside clean
Patent 7740768 was granted and assigned to Novellus Systems on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 12, 2006
0
Date of Patent
June 22, 2010
0
Patent Application Number
11548801
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Patent Inventor Names
Haruhiro H Goto
0
David Cheung
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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