Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas Justin Thompson0
Lloyd Anthony Brown0
Date of Patent
June 22, 2010
Patent Application Number
11729457
Date Filed
March 29, 2007
Patent Primary Examiner
Patent abstract
The present invention relates to methods and systems for purifying gases, such as for example semiconductor process gases. The invention more particularly relates to fluid purification methods and systems having improved heat transfer capabilities and controls such that the purified fluid produced from the process contains reduced impurity levels and/or exhibits more uniform concentrations within the final product. In another aspect of the invention, the activation time for adsorbent beds used in such processes and systems can be reduced.
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