Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 15, 2010
Patent Application Number
11241355
Date Filed
September 30, 2005
Patent Primary Examiner
Patent abstract
An integrated circuit device comprising a partially embedded and encapsulated damascene structure and method for forming the same to improve adhesion to an overlying dielectric layer, the integrated circuit device including a conductive material partially embedded in an opening formed in a dielectric layer; wherein said conductive material is encapsulated with a first barrier layer comprising sidewall and bottom portions and a second barrier layer covering a top portion, said conductive material and first barrier layer sidewall portions extending to a predetermined height above an upper surface of the dielectric layer to form a partially embedded damascene.
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