Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 15, 2010
Patent Application Number
11694932
Date Filed
March 30, 2007
Patent Primary Examiner
Patent abstract
The present invention describes a method of conditioning radiation upstream from a reticle including: pixelating the radiation, the pixelating involving partitioning into pixels; modulating a first set of the pixels to configure for openings; modulating a second set of the pixels to outline for specific features of the openings; modulating a third set of the pixels to correct for local non-uniformities; modulating a fourth set of the pixels to compensate for global non-uniformities; and modulating a fifth set of the pixels to establish for gray scale.
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