US Patent 7735357 SPM cantilever and manufacturing method thereof

Patent 7735357 was granted and assigned to Olympus Group on June, 2010 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Olympus Group

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7735357

Patent Inventor Names

Masashi Kitazawa0

Ryo Ota0

Masaki Tanemura0

Date of Patent

June 15, 2010

Patent Application Number

11587207

Date Filed

April 20, 2005

Patent Primary Examiner

Hezron Williams

Patent abstract

An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a).