Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Atsushi Ito0
Keiji Emoto0
Date of Patent
June 8, 2010
Patent Application Number
12244874
Date Filed
October 3, 2008
Patent Primary Examiner
Patent abstract
A substrate holding system including a substrate attracting device, an exhausting device, and a control device to operate the exhausting device so that a pressure around the substrate and a pressure at an interval between the substrate and the substrate attracting device are lowered to a first pressure and that only the pressure at the interval is subsequently lowered to a second pressure, which is lower than the first pressure.
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