US Patent 7727880 Protective self-aligned buffer layers for damascene interconnects
Patent 7727880 was granted and assigned to Novellus Systems on June, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 20, 2007
0
Date of Patent
June 1, 2010
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Patent Application Number
11709294
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Patent Citations Received
Patent Inventor Names
Yongsik Yu
0
Bart van Schravendijk
0
Kaushik Chattopadhyay
0
Mandyam Sriram
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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