Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 25, 2010
Patent Application Number
11300585
Date Filed
December 15, 2005
Patent Primary Examiner
Patent abstract
A first electrode is formed on a semiconductor substrate. A second electrode is formed separately at a predetermined interval from the first electrode, and has at least one opening. An actuator layer is connected to the second electrode, and drives the second electrode.
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