Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven Harold Moffat0
John Michael Miller0
Date of Patent
May 25, 2010
0Patent Application Number
121842880
Date Filed
August 1, 2008
0Patent Primary Examiner
Patent abstract
To reduce cross-talk between adjacent hot electrodes, the present invention provides a ground plane, which extends beneath each side of a MEMS mirror platform covering opposite edges of a hot electrode along each side thereof. The ground plane includes an overhang section extending between the mirror platform and the hot electrode forming a first gap between the hot electrode and the overhang section, and a second gap between the overhang section and the mirror platform. The method of the present invention enables highly accurate construction using lithographic patterning and deep reactive ion etching (DRIE).
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