Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jitendra S. Goela0
James T. Fahey0
Melinda S. Strickland0
Michael A. Pickering0
Date of Patent
May 25, 2010
0Patent Application Number
115442230
Date Filed
October 6, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Semiconductor processing and equipment are disclosed. The semiconductor equipment and processing provide semiconductor wafers with reduced defects.
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