US Patent 7709180 Soft pellicle and method of making same
Patent 7709180 was granted and assigned to SEMATECH on May, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 30, 2008
Date of Patent
May 4, 2010
Patent Application Number
12241624
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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