US Patent 7704031 Substrate processing apparatus

Patent 7704031 was granted and assigned to Dainippon Screen Mfg Co on April, 2010 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Dainippon Screen Mfg Co

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

77040310

Patent Inventor Names

Ichiro Mitsuyoshi0

Date of Patent

April 27, 2010

Patent Application Number

108133230

Date Filed

March 29, 2004

Patent Primary Examiner

‌

Michael S Lowe

Patent abstract

When FOUPs (front opening unified pods) (80a, 80b) are mounted on shelves (111d, 121c), respectively, shelves (121a, 121b, 121c) are moved in the vertical direction by cylinders (127a, 127b, 127c), respectively. The FOUP (80b) is thereby moved above the FOUP (80a) to create a space (129), for ensuring a transport path (AR6) for the FOUP (80a). The FOUP 80a can therefore be transported to a shelf (141) without moving the FOUP (80b) to another shelf, achieving improved throughput of substrate processing.