Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsuyoshi Takemoto0
Osamu Torayashiki0
Ryuta Araki0
Takashi Ikeda0
Hiroshi Nishida0
Date of Patent
April 13, 2010
0Patent Application Number
121471970
Date Filed
June 26, 2008
0Patent Primary Examiner
Patent abstract
A MEMS device including a getter film formed inside a hermetic chamber provides stable performance of the MEMS device by electrically stabilizing the getter film. The MEMS device includes a movable portion and a fixed portion formed inside the hermetic chamber. The hermetic chamber is formed by a base material of the MEMS device and glass substrates and having a cavity and cavities made therein. A part of any continuous getter film formed inside the hermetic chamber connects to only one of any one or a plurality of predetermined electrical potentials of the fixed portion and a ground potential of the fixed portion through the base material of the MEMS device.
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