Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Daniel N. Carothers0
Date of Patent
April 6, 2010
0Patent Application Number
122017910
Date Filed
August 29, 2008
0Patent Primary Examiner
Patent abstract
A salicide heater structure for use in thermo-optic and other heat-influenced semiconductor devices is disclosed. In one example embodiment, a system is provided that includes a silicon substrate, and a salicide heating element formed on the substrate, for delivering heat radiation to a heat-influenced semiconductor device. Another example embodiment is a salicide semiconductor system that includes a silicon substrate and a salicide structure formed on the substrate, wherein the salicide structure is for delivering heat radiation to a heat-influenced semiconductor device.
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