Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mikako Yokawa0
Kazuaki Sawada0
Keisuke Hirabayashi0
Makoto Ishida0
Daisuke Akai0
Date of Patent
April 6, 2010
0Patent Application Number
105493640
Date Filed
March 5, 2004
0Patent Primary Examiner
Patent abstract
A semiconductor element, a semiconductor sensor, and a semiconductor memory element are provided, in which an MFMIS structure having a lower electrode and an integrated circuit can be integrated. An epitaxially grown γ-Al2O3 single crystal film (2) is disposed on a semiconductor single crystal substrate (1), and an epitaxial single crystal Pt thin film (3) is disposed on the γ-Al2O3 single crystal film (2).
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