US Patent 7682860 Protection capsule for MEMS devices
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Patent abstract
A method of making a MEMS device is disclosed wherein anhydrous HF exposed silicon nitride is used as a temporary adhesion layer to permit the transfer of a layer from a carrier substrate to a receiving substrate.
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US Patent 07682860 Protection capsule for MEMS devices US Patent 7682860 Protection capsule for MEMS devices
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Patent Number
0768286000
Patent Number
768286000
Edits on 1 Apr, 2023
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Infobox
Is a
Patent Jurisdiction
Patent Number
076828600
Date of Patent
March 23, 2010
0Patent Application Number
116872870
Date Filed
March 16, 2007
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
076828600
Date of Patent
March 23, 2010
0Patent Application Number
116872870
Date Filed
March 16, 2007
0Official Website
Patent Primary Examiner
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US Patent 07682860 Protection capsule for MEMS devices
Infobox
Is a
Patent jurisdiction
Patent number
07682860
Date of patent
March 23, 2010
Patent application number
11687287
Date Filed
March 16, 2007
Patent primary examiner
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