Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Atsushi Okuyama0
Yuji Sugahara0
Yoshio Okamoto0
Kazumi Asada0
Date of Patent
March 23, 2010
0Patent Application Number
110808780
Date Filed
March 15, 2005
0Patent Primary Examiner
Patent abstract
After the resist stripping liquid is supplied to the surface of the substrate which is being rotated at a first rotational speed, the rotational speed of the substrate is reduced from the first rotational speed to a second rotational speed with the supply of the resist stripping liquid to the surface of the substrate continued, thereby forming a liquid film by a mount of the resist stripping liquid on the surface of the substrate and then, maintaining a state where the liquid film is formed.
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