Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Brian J. Daniels0
Ilan Golecki0
Denis H. Endisch0
Robert R. Roth0
Kikue S. Burnham0
Anil S. Bhanap0
Date of Patent
March 16, 2010
0Patent Application Number
110860100
Date Filed
March 22, 2005
0Patent Primary Examiner
Patent abstract
The invention concerns a method for applying a surface modification agent composition for organosilicate glass dielectric films. More particularly, the invention pertains to a method for treating a silicate or organosilicate dielectric film on a substrate, which film either comprises silanol moieties or has had at least some previously present carbon containing moieties removed therefrom. The treatment adds carbon containing moieties to the film and/or seals surface pores of the film, when the film is porous.
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