Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bearrach Moest0
Date of Patent
March 9, 2010
0Patent Application Number
121555020
Date Filed
June 5, 2008
0Patent Primary Examiner
Patent abstract
A device for transmission image sensing for sensing an aerial image in a lithographic exposure apparatus comprises a projection system arranged to form, at an image side of the projection system, an aerial image of an object mark. The device further comprises a detector comprising a slit pattern having features corresponding to at least a part of the aerial image. The slit pattern is arranged to be exposed to the aerial image. The detector is further being arranged to detect detection radiation transmitted by the slit pattern; wherein
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