US Patent 7675306 Prober apparatus and operating method therefor

Patent 7675306 was granted and assigned to Qimonda on March, 2010 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Qimonda

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7675306

Date of Patent

March 9, 2010

Patent Application Number

12043365

Date Filed

March 6, 2008

Patent Primary Examiner

‌

Ha Tran T Nguyen

Patent abstract

An operating method for a prober apparatus is disclosed which includes controlling the temperature of at least one part of the prober apparatus. Another operating method for a prober apparatus includes production and transfer of thermal energy between means for the exchange of heat and at least one component of the prober apparatus, wherein the production, the transfer or the production and the transfer of thermal energy is controlled. A prober apparatus includes at least one heat exchange element disposed in a spatial relation to at least one probe tool support so as to have an impact on the temperature thereof.