Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael A. A. In 'T Zandt0
Erwin A. Hijzen0
Jan Sonsky0
Date of Patent
March 2, 2010
0Patent Application Number
116281300
Date Filed
May 25, 2005
0Patent Primary Examiner
Patent abstract
A semiconductor device is formed with a lower field plate (32) and optional lateral field plates (34) around semiconductor (20) in which devices are formed, for example power FETs or other transistor or diode types. The semiconductor device is manufactured by forming trenches with insulated sidewalls, etching cavities (26) at the base of the trenches which join up and then filling the trenches with conductor (30).
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