Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akihiro Makiuchi0
Azusa Yanagisawa0
Hiroyuki Yusa0
Toshifumi Kikuchi0
Date of Patent
March 2, 2010
0Patent Application Number
114810590
Date Filed
July 6, 2006
0Patent Primary Examiner
Patent abstract
A resist pattern for alignment measurement being shrunk by a heat flow includes a plurality of positive type or negative type line patterns. Widths of spaces between the line patterns are greater than twice those of the line patterns. Alternatively, the resist pattern comprises a box-shaped or slit-shaped measurement pattern and a pair of box-shaped or slit-shaped auxiliary patterns provided inside and outside the measurement pattern, respectively.
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