Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ilya Lavitsky0
Keith A. Miller0
Date of Patent
March 2, 2010
0Patent Application Number
109812610
Date Filed
November 3, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate ring assembly is provided for a substrate support having a peripheral edge. The assembly has an annular band having an inner perimeter that surrounds and at least partially covers the peripheral edge of the substrate support. The assembly also has a clamp to secure the annular band to the peripheral edge of the substrate support.
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