US Patent 7667944 Polyceramic e-chuck
Patent 7667944 was granted and assigned to Praxair on February, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 29, 2007
0
Date of Patent
February 23, 2010
0
Patent Application Number
11823978
0
Patent Inventor Names
Mahmood Naim
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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