Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shinya Nishimoto0
Hidetoshi Kimura0
Hiroyuki Nakayama0
Date of Patent
February 16, 2010
Patent Application Number
11001298
Date Filed
December 2, 2004
Patent Primary Examiner
Patent abstract
An electrostatic chuck for attracting and holding a substrate by using an electrostatic force includes a plurality of protrusion portions to be brought into contact with the substrate. The protrusion portions are formed of a ceramic dielectric including grains each having a specified particle diameter, and contact surfaces of the protrusion portions with the substrate are formed to have a surface roughness depending on the particle diameter.
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