US Patent 7661544 Semiconductor wafer boat for batch processing
Patent 7661544 was granted and assigned to Tokyo Electron on February, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 1, 2007
0
Date of Patent
February 16, 2010
0
Patent Application Number
11670111
0
Patent Inventor Names
Frank Herzog
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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