Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 9, 2010
Patent Application Number
12334697
Date Filed
December 15, 2008
Patent Primary Examiner
Patent abstract
A substrate holding system for holding a substrate based on vacuum attraction and electrostatic attraction including a rim configured to support the substrate, a protrusion for the electrostatic attraction, configured to support the substrate inside the rim, and a protrusion for the vacuum attraction, configured to support the substrate inside the rim. A substrate supporting surface area of the protrusion of the electrostatic attraction is larger than a substrate supporting surface area of the protrusion for the vacuum attraction.
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