Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 2, 2010
Patent Application Number
11754801
Date Filed
May 29, 2007
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention discloses an overlay alignment measurement apparatus and method. The overlay target is periodic and is illuminated by coherent radiation; a Fourier transform lens optically computes the Fourier transform of the target. Analysis of the spatial frequencies at the Fourier plane yields overlay alignment information.
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