Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael Faeyrman0
Ibrahim Abdulhalim0
Michael Friedmann0
Mike Adel0
Date of Patent
February 2, 2010
Patent Application Number
11673115
Date Filed
February 9, 2007
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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