Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideo Takeuchi0
Yoshitsugu Yamamoto0
Date of Patent
February 2, 2010
Patent Application Number
11486271
Date Filed
July 14, 2006
Patent Primary Examiner
Patent abstract
A method for evaluating semiconductor layers includes irradiating semiconductor layers on a substrate with light; measuring an optical spectrum peculiar to excitons in the semiconductor layers; and analyzing a broadening factor of optical spectral features of the optical spectrum. The method provides a quick measurement of a surface state of the semiconductor layers with high accuracy.
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