Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Liang-Yuh Chen0
Donald J. K. Olgado0
Yan Wang0
Vladimir Galburt0
Alain Duboust0
Antoine P. Manens0
Date of Patent
February 2, 2010
0Patent Application Number
110435700
Date Filed
January 26, 2005
0Patent Primary Examiner
Patent abstract
A method and apparatus for electroprocessing a substrate is provided. In one embodiment, a method for electroprocessing a substrate includes the steps of biasing a first electrode to establish a first electroprocessing zone between the electrode and the substrate, and biasing a second electrode disposed radially outward of substrate with a polarity opposite the bias applied tot he first electrode.
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