Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 26, 2010
Patent Application Number
11544595
Date Filed
October 10, 2006
Patent Primary Examiner
Patent abstract
A filament member configured to discharge thermions may be employed in an ion source of an ion implantation apparatus. A filament member may include an anode disposed around a central portion of the filament member, a cathode disposed around a periphery of the filament and/or enclosing the anode, and at least one conductive path disposed between the anode and the cathode to discharge the thermions.
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