Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 26, 2010
Patent Application Number
11306207
Date Filed
December 20, 2005
Patent Primary Examiner
Patent abstract
An acceleration sensor has a semiconductor acceleration sensor chip and a case. The semiconductor acceleration sensor chip has a fixed portion, a plummet portion surrounding the fixed portion without contacting the fixed portion, and a beam portion connecting the fixed portion and the plummet portion, the thickness of the beam portion being thinner than the thickness of the fixed portion. The case has a cavity housing the semiconductor acceleration sensor chip, and a projection portion formed on the bottom face of the cavity, the bottom face of the fixed portion being fixed to the top face of the projection portion.
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