US Patent 7649198 Nano-array and fabrication method thereof

Patent 7649198 was granted and assigned to Industrial Technology Research Institute on January, 2010 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Industrial Technology Research Institute

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

76491980

Patent Inventor Names

Po-Ling Shiao0

Chih-Chiang Chao0

Mei-Chun Lai0

Date of Patent

January 19, 2010

Patent Application Number

115096600

Date Filed

August 25, 2006

Patent Primary Examiner

‌

Quoc D Hoang

Patent abstract

The invention provides a method for fabricating a nano-array comprising the following steps. A template with a plurality of nano-holes is provided. A polymer is embossed by the template to integrally form a plurality of nano-protrusions thereon, and demolding to reveal the nano-protrusions. The nano-protrusion has a concave or convex top surface.